Novellus Gamma
Novellus Gamma
  • Item IDATCL-2130062
  • S/N Sign In
  • CategoryAsher
  • ManufactoryLam Research
  • Wafer Size12"
  • LocationTaiwan
  • Vintage2003
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Novellus GAMMA 2130
Process : PR Strip

1. System Configuration:
● Main System
● Load Port: Brooks Fixload TM V6
● EFEM Robot: 02-169208-00
● Aligner: Yaskawa
● RF Rack: Generator ENI GHW-50A-04 5ea
● UI Panel
● Light Curtain: KEYENCE
● Signal Cable (RF Cable Included)

2. Process Chamber Configuration:
● GXT type (Upgrade Bell jar and Quartz tube)
● EPD: 4ea(#2,#3,#4,#5 Port)
● RF Matcher: CPMX-3000 5ea
● RF Source: 02-352103-00 5ea
● Load/Unload Port
● HDIS Pedestal: #2, #3, #,1, #6
● Fixed Pedestal: #4, #5
● Stage #1: Preheat
● Yaskawa Spindle
● Athenta Computer
● UI Computer
● Gate Valve: MDC ISO Valve
● Throttle Valve: NC
● Slit Valve: V-TEX
● Manometor: MKS 10 Torr
● Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4

Contact Us
Phone

+886-975-661581

Email

docwu@achilles.com.tw

Address

No. 20, Ln. 17, Niupu S. Rd., Xiangshan Dist., Hsinchu City 300060 , Taiwan

We are here to help and answer your questions. We look forward to hearing from you.

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