Equipment ListMembers only
TEL TSP 305SCCM Shin
- Item IDATCL-2123058
- S/N Sign In
- CategoryEtch
- ManufactoryTokyo Electron LTD
- Wafer Size12"
- LocationTaiwan
- Vintage2004
Telius SP-305 SCCM
Dielectric Etch
Equipment details
Process Oxide
Oxide Etch
Shin Chamber 3ea
EMO Front 3ea, Rear 6ea
RF Generator TOP 3ea
RF Generator BTM 3ea
RF Matcher TOP 3ea
RF Matcher BTM 3ea
Gas Line 12ea
Contact Us
Phone
+886-975-661581
Email
docwu@achilles.com.tw
Address
No. 20, Ln. 17, Niupu S. Rd., Xiangshan Dist., Hsinchu City 300060 , Taiwan
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