Equipment ListMembers only
TEL TSP 305 SCCM Shin
- Item IDATCL-2123059
- S/N Sign In
- CategoryEtch
- ManufactoryTokyo Electron LTD
- Wafer Size12"
- LocationTaiwan
- Vintage2004
EFEM 1ea
Shin Chamber 3ea
HPK1021-TE2 1ea
RF Generator: AGA-50B 3ea
DGP-120A2 3ea
RF PUMP BOX 3ea
TMP controller EI-4203MZ 3ea
GAS BOX 3ea
Contact Us
Phone
+886-975-661581
Email
docwu@achilles.com.tw
Address
No. 20, Ln. 17, Niupu S. Rd., Xiangshan Dist., Hsinchu City 300060 , Taiwan
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