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Tel TSP 305 SCCM Jin
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Tel TSP 305 SCCM Jin
Item ID
ATCL-2123060
S/N
H00383
Category
Etch
Manufactory
Tokyo Electron LTD
Wafer Size
12"
Location
Taiwan
Vintage
2004
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Description
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EFEM #1
EFEM #2
Jin Chamber 3ea
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