Novellus GAMMA 2130
Process : PR Strip

1. System Configuration:
● Main System
● Load Port: Brooks Fixload TM V6
● EFEM Robot: 02-169208-00
● Aligner: Yaskawa
● RF Rack: Generator ENI GHW-50A-04 5ea
● UI Panel
● Light Curtain: KEYENCE
● Signal Cable (RF Cable Included)

2. Process Chamber Configuration:
● GXT type (Upgrade Bell jar and Quartz tube)
● EPD: 4ea(#2,#3,#4,#5 Port)
● RF Matcher: CPMX-3000 5ea
● RF Source: 02-352103-00 5ea
● Load/Unload Port
● HDIS Pedestal: #2, #3, #,1, #6
● Fixed Pedestal: #4, #5
● Stage #1: Preheat
● Yaskawa Spindle
● Athenta Computer
● UI Computer
● Gate Valve: MDC ISO Valve
● Throttle Valve: NC
● Slit Valve: V-TEX
● Manometor: MKS 10 Torr
● Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4