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Equipment List
Your Equipment,We Provide. TEL TSP 305SCCM SE

300mm
4 SCCM SE Chamber

TEL TSP 305SCCM SE
Your Equipment,We Provide. TEL Telius SP SCCM

TSP30555SSS
3 Shin Chamber

TEL Telius SP SCCM
Your Equipment,We Provide. Novellus C2 SPEED

200mm DLCM
2 SPEED Chamber

Novellus C2 SPEED
Your Equipment,We Provide. TEL Unity2e DP

U2e-855PP
2 DP Chamber

TEL Unity2e DP
Your Equipment,We Provide. TEL Unity2e DRM

U2e 855DD
2 DRM Chamber

TEL Unity2e DRM

Feature Item

DLCM-S Right load lock interface PCB
DLCM-S Right load lock interface PCB
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Blade, shutter, 300mm, PVD, modified
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Blade, shutter, 300mm, PVD, modified
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Throttle valve driver
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Throttle valve driver
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CKD AGD21V-6RM-GWL4
CKD AGD21V-6RM-GWL4
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FUJI SEIKI MOD. 1616812
FUJI SEIKI MOD. 1616812
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TYB416-1/PUMP
TYB416-1/PUMP
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YASKAWA SGM-02A312B
YASKAWA SGM-02A312B
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Vicor VE-PU03-EYW  +5V, +24V, 100W
Vicor VE-PU03-EYW +5V, +24V, 100W
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ATCL
Achilles Technology Corporation Limited

No. 18, Ln. 17, Niupu S. Rd., Xiangshan Dist., Hsinchu City 300060 , Taiwan
Phone:+886-3-5300728 ,
Email:docwu@achilles.com.tw

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