Transfer Module

3 x DRM - 200mm chambers

AC rack - Turbo controller Seiko Seiki - ENI generators

SMC Chillers 2ea & controller

AC box

1) Mainframe + AC box

2) DRM chamber #1

3) DRM chamber #2 + DRM chamber #3

4) RF rack with ENI Generators / Seiko Seiki turbo controllers

5) Cables / water lines, ETC