TEL Unity M 8555DDD
TEL Unity M 8555DDD
  • Item IDATCL-2130058
  • S/N Sign In
  • CategoryEtch
  • ManufactoryTokyo Electron LTD
  • Wafer Size8"
  • LocationTaiwan
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Transfer Module

3 x DRM - 200mm chambers

AC rack - Turbo controller Seiko Seiki - ENI generators

SMC Chillers 2ea & controller

AC box

1) Mainframe + AC box

2) DRM chamber #1

3) DRM chamber #2 + DRM chamber #3

4) RF rack with ENI Generators / Seiko Seiki turbo controllers

5) Cables / water lines, ETC

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