Equipment ListMembers only
TEL Unity M 8555DDD
- Item IDATCL-2130058
- S/N Sign In
- CategoryEtch
- ManufactoryTokyo Electron LTD
- Wafer Size8"
- LocationTaiwan
Transfer Module
3 x DRM - 200mm chambers
AC rack - Turbo controller Seiko Seiki - ENI generators
SMC Chillers 2ea & controller
AC box
1) Mainframe + AC box
2) DRM chamber #1
3) DRM chamber #2 + DRM chamber #3
4) RF rack with ENI Generators / Seiko Seiki turbo controllers
5) Cables / water lines, ETC
Contact Us
Phone
+886-975-661581
Email
docwu@achilles.com.tw
Address
No. 20, Ln. 17, Niupu S. Rd., Xiangshan Dist., Hsinchu City 300060 , Taiwan
We are here to help and answer your questions. We look forward to hearing from you.