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Equipment List
TEL Tactras Vigus
TEL Tactras Vigus
  • Item IDATCL-2130060
  • S/N Sign In
  • CategoryEtch
  • ManufactoryTokyo Electron LTD
  • Wafer Size12"
  • LocationTaiwan
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Description

Tokyo Electron Ltd.
Tactras Vigus
EFEM
Vigus Chamber 3ea

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