Equipment List
TEL Tactras Vigus
- Item IDATCL-2130060
- S/N FA0349
- CategoryEtch
- ManufactoryTokyo Electron LTD
- Wafer Size12"
- LocationTaiwan
Tokyo Electron Ltd.
Tactras Vigus
EFEM
Vigus Chamber 3ea
Tokyo Electron Ltd.
Tactras Vigus
EFEM
Vigus Chamber 3ea
