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Equipment List
Your Equipment,We Provide. TEL TSP 305SCCM SE

300mm
4 SCCM SE Chamber

TEL TSP 305SCCM SE
Your Equipment,We Provide. TEL Telius SP SCCM

TSP30555SSS
3 Shin Chamber

TEL Telius SP SCCM
Your Equipment,We Provide. Novellus C2 SPEED

200mm DLCM
2 SPEED Chamber

Novellus C2 SPEED
Your Equipment,We Provide. TEL Unity2e DP

U2e-855PP
2 DP Chamber

TEL Unity2e DP
Your Equipment,We Provide. TEL Unity2e DRM

U2e 855DD
2 DRM Chamber

TEL Unity2e DRM

Feature Item

E244-000053-11 /E281-000032-12/ Tokyo Electron PCB,I/F..E2B023-11 ECU BRD
E244-000053-11 /E281-000032-12/ Tokyo Electron PCB,I/F..E2B023-11 ECU BRD
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3D80-002403-11 / Tokyo Electron PIPE, RF BTM L.. BTM-L
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3D80-002403-11 / Tokyo Electron PIPE, RF BTM L.. BTM-L
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2005-250235-11 / Tokyo Electron FOCUS RING, T11
2005-250235-11 / Tokyo Electron FOCUS RING, T11
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3D10-302020-11 / Tokyo Electron CEL,OX T10-75-C912 (COC-N)
3D10-302020-11 / Tokyo Electron CEL,OX T10-75-C912 (COC-N)
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1D80-004276-11 / YASKAWA ROBOT Controller SRC-II022
1D80-004276-11 / YASKAWA ROBOT Controller SRC-II022
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CX24-000011-12/OZONIZER..Z4-12721-1
CX24-000011-12/OZONIZER..Z4-12721-1
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1880-027013-14/P/C RF GENERATOR MFG-20SA3
1880-027013-14/P/C RF GENERATOR MFG-20SA3
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3D80-000793-14/60MHZ/5KWMATCHER..AMN-50B2
3D80-000793-14/60MHZ/5KWMATCHER..AMN-50B2
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