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Item ID	Item Name	Category	Manufacture	Request a Quote
16-00110-00	Chamber Gas Distribution 28428456mm	Novellus
NA	Mother Board/PCM-9562N-S6A1E	Novellus
16-034962-00	SHAFT INNER INDEX ROBOT	Novellus
60-180954-00	Swagelok Valve 6LVV-DPF111P-C含接管(三向單閥含管件)	Novellus
27-129142-00	MC3 RS485 Card (PCM-3618) old type	Novellus
15-00518-00	BSHG, ROTATION SEAL	Novellus
10-047697-00	Tube Assy, Gas Distribution	Novellus
NA	3/8"FVCR EP調壓閥	Novellus
61-362273-00	Filter,Heater Isolation Board,Cool Trace	Novellus
03-034719-00	DLCM-S Left load lock interface PCB	Novellus

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