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Brooks 5866RT 1 SLM Repair
Item ID : NA
Manufactory
Novellus
Used By
Location
Taiwan
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AE RFG 5500 5KW HF Generator(3155051-015 A) Repair
Item ID : 27-115617-00
Manufactory
Novellus
Used By
Location
Taiwan
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ASSY,ESC,200MM SEMI,MC
Item ID : 02-134263-00
Manufactory
Novellus
Used By
Location
Taiwan
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G10 DOME C2 SPEED
Item ID : 02-307391-00
Manufactory
Novellus
Used By
Location
Taiwan
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AE Apex 5513
Item ID : 27-278204-00
Manufactory
Novellus
Used By
Location
Taiwan
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Trazar RF Match AMU2-1
Item ID : 27-032653-00
Manufactory
Novellus
Used By
Location
Taiwan
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AE RFG3000 RF Generator 2750W
Item ID : 27-034212-00
Manufactory
Novellus
Used By
Location
Taiwan
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DLCM INDEXER ROBOT ASSY (Right)
Item ID : 02-053993-01
Manufactory
Novellus
Used By
Location
Taiwan
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LFC,5ML/MIN,TEOS,1/8MVCR DIGITAL,D2000I,PARKER
Item ID : 27-367678-00
Manufactory
Novellus
Used By
Location
Taiwan
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Rev.C, Controller
Item ID : 02-047304-00
Manufactory
Novellus
Used By
Location
Taiwan
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Category
Asher(2)
CVD(260)
Etch(144)
PVD(1)
-(15)
Manufactory
Applied Materials(102)
Tokyo Electron LTD(112)
Lam Research(9)
SANYO DENKI(1)
Novellus(162)
Fujikin(24)
ARMOR CRYSTAL(2)
ENI(6)
DAIHEN(3)
YASKAWA(2)
Relative
Applied Materials(1)
Tokyo Electron LTD(143)
Novellus(2)
Fujikin(2)
ENI(1)
Wafer Size
6"(1)
8"(10)
12"(42)
-(370)