Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Category
15-113724-00	DLCM Mount, Retro Reflector Z-Cal, Right	Novellus
15-11197-00	Seal, Flange, Z-Sense	Novellus
17-047688-00	Bracket,Valve Mtg,Gas Distribution	Novellus
17-052587-00	Bracket,2 Valve Mtg	Novellus
15-10524-00	Tie Block,Transfer Module(橫)	Novellus
15-10523-00	Tie Block,Process Module(直)	Novellus
16-00099-00	Strap,Bottom Plate Grnd	Novellus
15-051120-00	Rod,Mtg,MEI	Novellus
15-11632-00	Plate mtg actuator	Novellus
15-11108-00	Rod,Mtg, 4-Axis controller	Novellus