Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Manufacture
NA	Tylan FC-2900MEP5	Tokyo Electron LTD
1D81-000049-1	Pressure SW I/F Board	Tokyo Electron LTD
22-048182-00	Ftg, Adapter, 3/8 SAE-3/8 AN	Novellus
16-00203-00	Plate Mounting Pedestal	Novellus
NA	1/2" MVCR bulkhead For Altus DP	Novellus
NA	P0 Clamp	Novellus
16-10490-00	Bracket, EMO	Novellus
15-00839-00	Screw Hex 1/4200.9" Solg Nickel	Novellus
15-046261-00	Shaft Geneve Driver	Novellus
17-254259-00	Brkt RF Match HF RF Input	Novellus