Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Category
NA	DAIHEN MFT-20SB	Tokyo Electron LTD
1D81-000096-AD	TYB211-1/GAS	Tokyo Electron LTD
1D08-000097-13	TYB212-1/RF	Tokyo Electron LTD
1D81-000114	TYB415-1/RF	Tokyo Electron LTD
1D81-000115	TYB414-1/CONT	Tokyo Electron LTD
1D81-000130	TYB416-1/PUMP	Tokyo Electron LTD
1D81-000118	TYB417-1/OPE	Tokyo Electron LTD
1D81-000099-C3	TYB111-1/MAIO	Tokyo Electron LTD
1D81-000293	TYB31D-1/TC	Tokyo Electron LTD
NA	KIKUSUI PMC18-2A	Tokyo Electron LTD