Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Manufacture
60-00091-00	氣缸 COMPACT RD 118X34TBE	Novellus
20-123267-00	Seal Plate,L-motion,Module	Novellus
15-10965-00	DLCM Bottom Plate, Sensor Cover, Bottom Left	Novellus
15-032185-00	Pin,Centering,Sapphire	Novellus
NA	RF CNTR COVER	Novellus
17-126650-00	Flag, Geneva, 200 mm, SEQUEL-X	Novellus
15-048076-00	Clamp, Lift Pin	Novellus
15-034848-00	Hub,Lower Indexer	Novellus
1D81-000065-1	AC POW FAIL DET BRD B	Tokyo Electron LTD
1D81-000065-1	AC POW FAIL DET BRD B	Tokyo Electron LTD