Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Category
34-152746-00	Heater, HIM Main	Novellus
15-032014-01	Window QUARTZ View Port 石英	Novellus
02-034112-00	ASSY., COOL STATION, 2-LAYER	Novellus
15-00475-00	Insulator Gas Feedthru,ceramic	Novellus
15-11031-00	Feedthru, Top Plate	Novellus
15-11146-00	DLCM Top Window ARC Loadlock Chamber	Novellus
02-111903-00	RF Feedthru	Novellus
15-055721-00	Bushing,Split	Novellus
15-034109-00	Self 3 Layer Right Cool Station	Novellus
15-034110-00	Shelf 3 Layer Left Cool Station	Novellus