Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Manufacture
04-10075-00	RF Interface Board	Novellus
NA	MDC(KAV-150-P-10 ) Chamber Roughing valve(Model:311074-10)	Novellus
NA	Mix bowl Gasline	Novellus
10-047690-00	Tube Assy, Cap-Man Slow Pump	Novellus
10-034074-00	Tube Assy Right SLOW	Novellus
2L80-000685-11-01	EI-D4203M (T1)	Tokyo Electron LTD
15-00539-00	COVER,SEAL	Novellus
15-029833-02	Plate, Mtg, Adj, Front ARC, Left	Novellus
NA	3-way pneumatic valve(Normal Close)	Novellus
NA	35A Fromed Bellows	Novellus