Equipment - System - ATCL 阿基里斯科技股份有限公司

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Item ID	Item Name	Manufacture
27-10329-00	CT-N806 Diaganostic Hub	Novellus
60-180954-01	Parker Valve 930AOPLPNCSC含接管(三向單閥含管件)	Novellus
22-10395-00	1/4MVCR限流器(N2 30PSI 25SCCM)	Novellus
10-029562-00	Tube Assy, F-Line Adaptor	Novellus
10-153169-00	Tube assy HBCA to Forline	Novellus
NA	Sleeve,Flanged Plate,Ceramic	Novellus
16-057471-00	Enclosure, LPB Repair	Novellus
15-00542-00	Retainer Seal	Novellus
NA	Bandpass filter, 1" diameter 483nm	Novellus
NA	Banpass filter,1" diameter 261nm	Novellus