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SEC-Z522MGXNC-MRMG-#6.5-SUC-4CRL WF6 1SLM
Novellus
15-00835-00
Plalform lift pin 100/200mm
Novellus
16-028993-00
Altus assy Tube Main exhaust
Novellus
02-133362-00
ILDS Assy TEOS-Gas box-組合件
Novellus
15-028471-00
Plate TOP Altus(腔體上蓋)腔體需有水路
Novellus
15-251973-00
Plate Bottom Altus(腔體下蓋)腔體需有水路
Novellus
16-131278-00
200mm Heater block LOW Contact Area 8"
Novellus
03-030009-01
ALTUS-S Interlock Board (已插件成品-01版)
Novellus
15-109785-00
HOUSING,BRG,DP SPNDL CVDL CVDW
Novellus
15-034954-00
Housing indexer
Novellus
15/33
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Asher(2)
CVD(161)
Etch(144)
PVD(1)
-(15)
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Applied Materials(2)
Tokyo Electron LTD(112)
Lam Research(9)
SANYO DENKI(1)
Novellus(163)
Fujikin(24)
ARMOR CRYSTAL(2)
ENI(6)
DAIHEN(3)
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Applied Materials(1)
Tokyo Electron LTD(143)
Novellus(3)
Fujikin(2)
ENI(1)
Wafer Size
6"(1)
8"(10)
12"(42)
-(271)