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產品編號	設備名稱	製造廠
NA	AS568A-261-4079 Karlez O-ring(全氟, 黑)	Novellus
22-123217-00	AS568A-261-4079 Karlez O-ring (KTA2107)	Novellus
NA	Sequel Alignment Tool	Novellus
34-152746-00	Heater, HIM Main	Novellus
15-032014-01	Window QUARTZ View Port 石英	Novellus
02-034112-00	ASSY., COOL STATION, 2-LAYER	Novellus
15-00475-00	Insulator Gas Feedthru,ceramic	Novellus
15-11031-00	Feedthru, Top Plate	Novellus
15-11146-00	DLCM Top Window ARC Loadlock Chamber	Novellus
02-111903-00	RF Feedthru	Novellus