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產品編號	設備名稱	製造廠
15-01103-00	Shaft,Ring Lift	Novellus
60-00208-00	6LVV-DPVR4-P-C	Novellus
20-00443-00	ENIDINE ADA 505 TC	Novellus
22-00090-00	Filter SGLF6101VM4	Novellus
15-257942-23	90 Nanofill 0.23mil injector nozzle	Novellus
15-257942-24	90 Nanofill 0.24mil injector nozzle	Novellus
27-129142-00	MC3 RS485 Card (PCM-3618)- old type(EMM-8P-XT)	Novellus
27-056664-00	DAQ Card-700	Novellus
60-145563-00	speed turbo n2 pipe	Novellus
60-147402-00	hose,HDP SS-FJ8RM8RM8-62CM(台製)	Novellus