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產品編號	設備名稱	製造廠
60-10006-00	275821 Convectron Gauge D0 W/VCR4	Novellus
15-00982-00	Shaft,Spindle,Ring Lift	Novellus
34-159719-00	Relay,SPDT,26V,VAC,Hi Voltage	Novellus
NA	Mag7 Robot Power Supply	Novellus
27-127854-00	Cosel power supply 24v 500w UAW500S-24	Novellus
10-150650-00	Tube assy HBCA Pub bulkhead	Novellus
03-034720-00	DLCM-S Right load lock interface PCB	Novellus
03-030009-00	ALTUS-S Interlock Board Repair	Novellus
27-162437-00	PCM-9576F	Novellus
NA	MC3 PCM 3663-02A1E	Novellus