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產品編號	設備名稱	設備類別	製造廠	詢價
60-00187-00	TURN-ACT 122-B353A ROTARY ACTUATOR	Novellus
NA	Preiffer TMH260 Turbo Pump & Controller assy	Novellus
27-121645-00	Match, Trazar, AMU2-1	Novellus
02-113649-00	RF Dist Assy, Top Plate 本壘板組合件	Novellus
02-148175-00	Injector Assy He Purge Liquid A	Novellus
NA	RF Matcher 13.56 MHZ (SRN 2-1)	Novellus
02-124409-01	C2 Altus Penumatic interlock assembly(PC9989)	Novellus
22-029968-00	Cntrlr, Pressure, 3 slm,Invert Mtg(5866RB1A1G4M2NA-Ar-3slpm)	Novellus
60-130892-00	MKS Throttle Valve 153D-15972	Novellus
02-056630-00	Controller Assy, OEPD (Altus end point)	Novellus

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