Equipment

Etching

[200mm] TEL Unity M 8555DDD

型號:[200mm] TEL Unity M 8555DDD

產品說明

TEL Unity M 8555 DDD 

Configurations:

Transfer Module

3 x DRM - 200mm chambers

AC rack - Turbo controller Seiko Seiki  - ENI generators

SMC Chillers 2ea & controller

AC box

1) Mainframe + AC box

2) DRM chamber #1

3) DRM chamber #2 + DRM chamber #3

4) RF rack with ENI Generators / Seiko Seiki turbo controllers

5) Cables / water lines, ETC


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